Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition
Xueping Li, Takashi Kasai, Shigeki Nakao, Taeko Ando, Mitsuhiro Shikida, Kazuo Sato, Hiroshi TanakaVolume:
117
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2004.06.003
File:
PDF, 460 KB
english, 2005