Transient capacitance measurement of MEM capacitor

Sensors and Actuators A: Physical 2005 Vol. 117; Iss. 2

Transient capacitance measurement of MEM capacitor

Heikki Nieminen, Jari Hyyryläinen, Timo Veijola, Tapani Ryhänen, Vladimir Ermolov
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Volume:
117
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2004.06.023
File:
PDF, 212 KB
english, 2005
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