![](/img/cover-not-exists.png)
Fabrication of hard magnetic microarrays by electroless codeposition for MEMS actuators
Shan Guan, Bradley J. NelsonVolume:
118
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2004.08.020
File:
PDF, 306 KB
english, 2005