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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure
Yamane, Hokuto, Nagasawa, SumitoYear:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7050950
File:
PDF, 2.51 MB
english, 2015