Efficient modeling of a biaxial micromirror with decoupled...

Sensors and Actuators A: Physical 2005 Vol. 120; Iss. 1

Efficient modeling of a biaxial micromirror with decoupled mechanism

Yahong Yao, Xiaoping Zhang, Gaofeng Wang, Liji Huang
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Volume:
120
Year:
2005
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2004.11.003
File:
PDF, 302 KB
english, 2005
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