Nonlinear mechanical effects in silicon longitudinal mode beam resonators
Ville Kaajakari, Tomi Mattila, Antti Lipsanen, Aarne OjaVolume:
120
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2004.11.010
File:
PDF, 318 KB
english, 2005