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Nonlinear mechanical effects in silicon longitudinal mode...

Nonlinear mechanical effects in silicon longitudinal mode beam resonators

Ville Kaajakari, Tomi Mattila, Antti Lipsanen, Aarne Oja
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Volume:
120
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2004.11.010
File:
PDF, 318 KB
english, 2005
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