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Localized laser assisted eutectic bonding of quartz and silicon by Nd:YAG pulsed-laser
A.W.Y. Tan, F.E.H. TayVolume:
120
Year:
2005
Language:
english
Pages:
12
DOI:
10.1016/j.sna.2004.11.035
File:
PDF, 900 KB
english, 2005