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The effect of anisotropic wet etching on the surface roughness parameters and micro/nanoscale friction behavior of Si(1 0 0) surfaces
S. Chandrasekaran, J. Check, S. Sundararajan, P. ShrotriyaVolume:
121
Year:
2005
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2004.12.013
File:
PDF, 486 KB
english, 2005