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A novel out-of-plane MEMS tunneling accelerometer
Haifeng Dong, Yubin Jia, Yilong Hao, Sanmin ShenVolume:
120
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.sna.2004.12.021
File:
PDF, 326 KB
english, 2005