A MEMS multi-sensor chip for gas flow sensing

Sensors and Actuators A: Physical 2005 Vol. 121; Iss. 1

A MEMS multi-sensor chip for gas flow sensing

Yong Xu, Chen-Wei Chiu, Fukang Jiang, Qiao Lin, Yu-Chong Tai
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Volume:
121
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.sna.2004.12.022
File:
PDF, 284 KB
english, 2005
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