Influence of polycrystalline silicon as electrical shield...

Sensors and Actuators A: Physical 2005 Vol. 120; Iss. 2

Influence of polycrystalline silicon as electrical shield on reliability and stability of piezoresistive sensors

Phan L.P. Hoa, G. Suchaneck, G. Gerlach
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
120
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2004.12.029
File:
PDF, 306 KB
english, 2005
Conversion to is in progress
Conversion to is failed