Growth of Highly Aluminum-Doped p-type 6H-SiC Single...

Growth of Highly Aluminum-Doped p-type 6H-SiC Single Crystals by the Modified Lely Method

Schulze, Norbert, Gajowski, Jürgen, Semmelroth, Kurt, Laube, Michael, Pensl, Gerhard
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Volume:
353-356
Year:
2001
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.353-356.45
File:
PDF, 351 KB
2001
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