![](/img/cover-not-exists.png)
Broadband MEMS shunt switches using PZT/HfO2 multi-layered high k dielectrics for high switching isolation
Jiunnjye Tsaur, Kazumasa Onodera, Takeshi Kobayashi, Zhang-Jie Wang, Sven Heisig, Ryutaro Maeda, Tadatomo SugaVolume:
121
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2005.01.026
File:
PDF, 526 KB
english, 2005