Dual-axis MEMS mirror for large deflection-angle using SU-8...

Sensors and Actuators A: Physical 2005 Vol. 121; Iss. 1

Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam

Takayuki Fujita, Kazusuke Maenaka, Yoichiro Takayama
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Volume:
121
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2005.01.029
File:
PDF, 517 KB
english, 2005
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