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Etch-stop characteristics of heavily B/Ge-doped silicon epilayer in KOH and TMAH
Svetlana Tatic-Lucic, Wen-Yue Zhang, Navneet NavneetVolume:
123-124
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2005.01.034
File:
PDF, 305 KB
english, 2005