Dynamics of MEMS electrostatic driving using a photovoltaic...

Sensors and Actuators A: Physical 2005 Vol. 121; Iss. 1

Dynamics of MEMS electrostatic driving using a photovoltaic source

Sandra Bermejo, Luis Castañer
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Volume:
121
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2005.02.003
File:
PDF, 230 KB
english, 2005
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