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Comparative study of spin coated and sputtered PMMA as an etch mask material for silicon micromachining
Dhananjay S. Bodas, S.K. Mahapatra, S.A. GangalVolume:
120
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2005.02.005
File:
PDF, 247 KB
english, 2005