Design, fabrication and operation of MEMS gimbal gyroscope

Sensors and Actuators A: Physical 2005 Vol. 121; Iss. 1

Design, fabrication and operation of MEMS gimbal gyroscope

Kazusuke Maenaka, Sunao Ioku, Nobuhiro Sawai, Takayuki Fujita, Yoichiro Takayama
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Volume:
121
Year:
2005
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2005.02.012
File:
PDF, 666 KB
english, 2005
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