Electric field sensor using electrostatic force deflection of a micro-spring supported membrane
A. Roncin, C. Shafai, D.R. SwatekVolume:
123-124
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2005.02.018
File:
PDF, 330 KB
english, 2005