A torsional MEMS varactor with wide dynamic range and low...

Sensors and Actuators A: Physical 2005 Vol. 121; Iss. 2

A torsional MEMS varactor with wide dynamic range and low actuation voltage

C. Venkatesh, Shashidhar Pati, Navakanta Bhat, Rudra Pratap
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Volume:
121
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2005.03.003
File:
PDF, 355 KB
english, 2005
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