Improvements in MEMS gyroscope production as a result of...

Sensors and Actuators A: Physical 2005 Vol. 123-124; Iss. none

Improvements in MEMS gyroscope production as a result of using in situ, aligned, current-limited anodic bonding

Tony Rogers, Nick Aitken, Kevin Stribley, James Boyd
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Volume:
123-124
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.sna.2005.03.009
File:
PDF, 413 KB
english, 2005
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