A spectral vibration detection system based on tunable micromechanical resonators
D. Scheibner, J. Mehner, D. Reuter, T. Gessner, W. DötzelVolume:
123-124
Year:
2005
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2005.03.034
File:
PDF, 981 KB
english, 2005