A spectral vibration detection system based on tunable...

A spectral vibration detection system based on tunable micromechanical resonators

D. Scheibner, J. Mehner, D. Reuter, T. Gessner, W. Dötzel
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Volume:
123-124
Year:
2005
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2005.03.034
File:
PDF, 981 KB
english, 2005
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