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Mirror electrostatic actuation of a medium-infrared tuneable Fabry-Perot interferometer based on a surface micromachining process
N. Sabaté, R. Rubio, C. Calaza, J. Santander, L. Fonseca, I. Gràcia, C. Cané, M. Moreno, S. MarcoVolume:
123-124
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2005.03.036
File:
PDF, 470 KB
english, 2005