Empirical and theoretical characterisation of...

Sensors and Actuators A: Physical 2005 Vol. 123-124; Iss. none

Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients

J. De Coster, H.A.C. Tilmans, J.M.J. den Toonder, J.T.M. van Beek, Th.G.S.M. Rijks, P.G. Steeneken, R. Puers
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Volume:
123-124
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2005.03.075
File:
PDF, 737 KB
english, 2005
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