Focused ion beam fabrication of thermally actuated bimorph...

Sensors and Actuators A: Physical 2005 Vol. 123-124; Iss. none

Focused ion beam fabrication of thermally actuated bimorph cantilevers

J. Teng, P.D. Prewett
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Volume:
123-124
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2005.04.030
File:
PDF, 542 KB
english, 2005
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