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Si-piezoresistive microcantilevers for highly integrated parallel force detection applications
Daisuke Saya, Pascal Belaubre, Fabrice Mathieu, Denis Lagrange, Jean-Bernard Pourciel, Christian BergaudVolume:
123-124
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2005.04.031
File:
PDF, 870 KB
english, 2005