![](/img/cover-not-exists.png)
Temperature Facilitated ECR-Etching for Isotropic SiC Structuring
Niebelschütz, Florentina, Stauden, Thomas, Tonisch, Katja, Pezoldt, JörgVolume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.849
Date:
April, 2010
File:
PDF, 1.69 MB
english, 2010