Wafer-compatible fabrication and characteristics of nanocrystalline silicon thermally induced ultrasound emitters
Takashi Kihara, Toshihiro Harada, Nobuyoshi KoshidaVolume:
125
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2005.07.021
File:
PDF, 395 KB
english, 2006