Wafer-scale fabrication of infrared detectors based on tunneling displacement transducers
Olaleye Ajakaiye, John Grade, Choongsoo Shin, Thomas KennyVolume:
134
Year:
2007
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2005.07.028
File:
PDF, 853 KB
english, 2007