Residual stress influences on the sensitivity of ultrasonic...

Residual stress influences on the sensitivity of ultrasonic sensor having composite membrane structure

Seungmock Lee, Tsunehisa Tanaka, Koji Inoue
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Volume:
125
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2005.08.011
File:
PDF, 314 KB
english, 2006
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