High sensitive touch sensor with piezoelectric thin film...

Sensors and Actuators A: Physical 2006 Vol. 126; Iss. 1

High sensitive touch sensor with piezoelectric thin film for pipetting works under microscope

Kohei Motoo, Fumihito Arai, Toshio Fukuda, Tohoru Katsuragi, Kouichi Itoigawa
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Volume:
126
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2005.08.030
File:
PDF, 414 KB
english, 2006
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