Working Pressure Dependence of Properties of Al 2 O 3 Thin Films Prepared by Electron Beam Evaporation
Mei-Qiong, Zhan, Zhong-Lin, Wu, Zheng-xiu, FanVolume:
25
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/25/2/057
Date:
February, 2008
File:
PDF, 151 KB
english, 2008