![](/img/cover-not-exists.png)
A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators
S. Saravanan, E. Berenschot, G. Krijnen, M. ElwenspoekVolume:
130-131
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2005.09.029
File:
PDF, 458 KB
english, 2006