Fabrication of short and thin silicon cantilevers for AFM...

Sensors and Actuators A: Physical 2006 Vol. 126; Iss. 2

Fabrication of short and thin silicon cantilevers for AFM with SOI wafers

Qingkai Yu, Guoting Qin, Chinmay Darne, Chengzhi Cai, Wanda Wosik, Shin-Shem Pei
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Volume:
126
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2005.10.019
File:
PDF, 288 KB
english, 2006
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