High voltage thin film transistors integrated with MEMS

Sensors and Actuators A: Physical 2006 Vol. 130-131; Iss. none

High voltage thin film transistors integrated with MEMS

Eugene M. Chow, Jeng Ping Lu, Jackson Ho, Chinwen Shih, Dirk De Bruyker, Michel Rosa, Eric Peeters
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Volume:
130-131
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.sna.2005.10.028
File:
PDF, 365 KB
english, 2006
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