Coupled-resonator micromechanical filters with voltage...

Sensors and Actuators A: Physical 2006 Vol. 126; Iss. 1

Coupled-resonator micromechanical filters with voltage tuneable bandpass characteristic in thick-film polysilicon technology

Dimitri Galayko, Andreas Kaiser, Bernard Legrand, Lionel Buchaillot, Chantal Combi, Dominique Collard
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Volume:
126
Year:
2006
Language:
english
Pages:
14
DOI:
10.1016/j.sna.2005.10.033
File:
PDF, 825 KB
english, 2006
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