Three-dimensional nanosprings for electromechanical sensors
D.J. Bell, Y. Sun, L. Zhang, L.X. Dong, B.J. Nelson, D. GrützmacherVolume:
130-131
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2005.10.057
File:
PDF, 644 KB
english, 2006