Design parameter characterisation and experimental validation of hydrostatic actuation suitable for MEMS
Simon Mutzenich, Thurai Vinay, Dinesh K. Sood, Gary RosengartenVolume:
127
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2005.11.002
File:
PDF, 405 KB
english, 2006