Design parameter characterisation and experimental...

Design parameter characterisation and experimental validation of hydrostatic actuation suitable for MEMS

Simon Mutzenich, Thurai Vinay, Dinesh K. Sood, Gary Rosengarten
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Volume:
127
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2005.11.002
File:
PDF, 405 KB
english, 2006
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