Tuning the shape and curvature of micromachined cantilevers...

Sensors and Actuators A: Physical 2006 Vol. 130-131; Iss. none

Tuning the shape and curvature of micromachined cantilevers using multiple plasma treatments

Wang-Shen Su, Sheng-Ta Lee, Cheng-Yu Lin, Ming-Shih Tsai, Ming-Chuen Yip, Weileun Fang
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Volume:
130-131
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.sna.2005.11.010
File:
PDF, 736 KB
english, 2006
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