Micromachining of GaAs structures with an acidic hydrogen peroxide solution: Experimental and theoretical 3D etching shapes
C.R. Tellier, G. Huve, T.G. LebloisVolume:
127
Year:
2006
Language:
english
Pages:
15
DOI:
10.1016/j.sna.2005.11.012
File:
PDF, 1.25 MB
english, 2006