Production and characterisations of thin films deposited by...

Sensors and Actuators A: Physical 2006 Vol. 129; Iss. 1-2

Production and characterisations of thin films deposited by a novel vacuum coating plant (VCP)

Hakan Kockar, Turgut Meydan, Mursel Alper, Elif Gungor
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Volume:
129
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.sna.2005.11.041
File:
PDF, 277 KB
english, 2006
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