Nb-doped TiO2 films for transparent conductive electrodes with low resistivity deposited by dc magnetron sputtering using a TiO2-x–Nb2O5-x target
Sato, Yasushi, Sanno, Yuta, Oka, Nobuto, Kamiyama, Toshihisa, Shigesato, YuzoVolume:
1109
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1109-B03-26
Date:
January, 2008
File:
PDF, 313 KB
english, 2008