Micromachined integrated shock protection for MEMS
Sang Won Yoon, Navid Yazdi, Noel C. Perkins, Khalil NajafiVolume:
130-131
Year:
2006
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2005.12.032
File:
PDF, 699 KB
english, 2006