Micromachined integrated shock protection for MEMS

Micromachined integrated shock protection for MEMS

Sang Won Yoon, Navid Yazdi, Noel C. Perkins, Khalil Najafi
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Volume:
130-131
Year:
2006
Language:
english
Pages:
10
DOI:
10.1016/j.sna.2005.12.032
File:
PDF, 699 KB
english, 2006
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