Characterization of KrF excimer laser annealed PECVD SixGe1−x for MEMS post-processing
Sherif Sedky, Maria Gromova, Tom Van der Donck, Jean-Pierre Celis, Ann WitvrouwVolume:
127
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2006.01.035
File:
PDF, 465 KB
english, 2006