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SiC cantilever resonators with electrothermal actuation
Liudi Jiang, R. Cheung, J. Hedley, M. Hassan, A.J. Harris, J.S. Burdess, M. Mehregany, C.A. ZormanVolume:
128
Year:
2006
Language:
english
Pages:
11
DOI:
10.1016/j.sna.2006.01.045
File:
PDF, 587 KB
english, 2006