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On the design of GaAs (hhl) resonant cantilevers: Study of piezoelectric excitation, of piezoresistive sensing and of micromachined structure
C.R Tellier, T.G. LebloisVolume:
132
Year:
2006
Language:
english
Pages:
12
DOI:
10.1016/j.sna.2006.02.001
File:
PDF, 924 KB
english, 2006