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Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer
Huai-Yuan Chu, Tzu-Ying Kuo, Baowen Chang, Shao-Wei Lu, Chuan-Chin Chiao, Weileun FangVolume:
130-131
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.sna.2006.02.010
File:
PDF, 2.87 MB
english, 2006