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Static and dynamic responses of an electromagnetic bistable–bidirectional microactuator on a single silicon substrate
Jemmy Sutanto, Peter J. Hesketh, Yves H. BerthelotVolume:
132
Year:
2006
Language:
english
Pages:
13
DOI:
10.1016/j.sna.2006.02.020
File:
PDF, 1.96 MB
english, 2006