Research on low-temperature anodic bonding using induction...

Sensors and Actuators A: Physical 2007 Vol. 133; Iss. 1

Research on low-temperature anodic bonding using induction heating

Mingxiang Chen, Liulin Yuan, Sheng Liu
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Volume:
133
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.sna.2006.03.011
File:
PDF, 285 KB
english, 2007
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