Effects of gas type on the sensitivity and transition...

Effects of gas type on the sensitivity and transition pressure of integrated thermal flow sensors

P. Bruschi, M. Piotto, G. Barillaro
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Volume:
132
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.sna.2006.03.021
File:
PDF, 564 KB
english, 2006
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